WG2 - Precursors and processes

Description and purpose: 

To synthesise new chemical precursors and use them in thin film deposition experiments to find viable ALD processes for materials where no process exists at present.

Joint publications:

10.1116/1.4961113

10.1039/C5TC02293B

10.1116/1.4964890

10.1016/j.apsusc.2016.01.216

10.1039/c5ta00111k

10.1039/c5dt00922g

Workshops for this WG:

20th Biannual European Conference on Chemical Vapour Deposition (EUROCVD20)

WG2 workshop and 4th ALDCoE annual seminar