WG4 - Devices

Description and purpose: 

To develop and integrate ALD processes for oxides, sulfides and nitrides for applications in transparent electronics, memristors, light emitting devices and nanosensors, in collaboration with industry.

Joint Publications:

10.1016/j.apsusc.2016.01.216

10.1039/c5ta00111k

Workshops for this WG:

ALD Symposium at SEMICON Europa

Novel High k Application Workshop 2015

Novel High k Application Workshop 2016

MAM 2016 Materials for Advanced Metallization; Workshop on ALD for BEoL applications

second Belux workshop