10.1088/1361-6463/aa59b3

The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2–N2 capacitive discharges
M Napari, O Tarvainen, S Kinnunen, K Arstila, J Julin, Ø S Fjellvåg, K Weibye, O Nilsen and T Sajavaara
Journal of Physics D: Applied Physics
2017
50
95201