September 2017

Training school on ion beam techniques to study ALD films in Jyväskylä, Finland, 6-8 Nov 2017

  • Purpose/aim of event: To first give the participants an introduction to different ion beam analysis techniques, especially in the analysis of thin films, followed by a hands-on experience in the art of time-of-flight elastic recoil detection analysis (TOF-ERDA), Rutherford backscattering spectrometry (RBS) and helium ion microscopy (HIM)
  • Invited speakers and tentative titles:
    • Prof. Mikko Ritala, University of Helsinki, Finland: Importance of ion beam analysis in ALD research
    • Prof. Chris Jeynes, University of Surrey, UK: IBA (RBS) basics and application for thin film studies
    • Dr. Daniel Primetzhofer, University of Uppsala, Sweden: Medium energy ion scattering
    • Dr. Johan Meerschaut, Imec, Belgium: Ion beam analysis in industrial environment at Imec
    • Dr. Kai Arstila, University of Jyväskylä, Finland: Helium ion microscopy and spectroscopy
    • Prof. Timo Sajavaara, University of Jyväskylä, Finland: Analysis of light and heavy elements using heavy-ion ERDA
  • Cost, number
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