February 2019

4th Area Selective Deposition Workshop

ASM and IMEC are proud to announce that the 4th Area Selective Deposition (ASD) Workshop will be held on April 4th – 5th, 2019 in IMEC, Leuven (Belgium).

Based on a series of successful workshops at North Carolina State University in 2018, Eindhoven University of Technology in 2017, and imec in 2016, the 4th ASD workshop will bring together leading experts from both academia and industry to share their vision and results about area selective deposition research and applications, on topics such as:

  • Area selective epitaxy and area selective chemical vapor deposition
  • Intrinsic selectivity of ALD processes
  • Methods for area selective activation / deactivation
  • Processes and mechanisms for area selective atomic layer deposition
  • Metrology and defects control
  • Applications of area selective deposition

On behalf of the organizing committee, it will be our pleasure to welcome you in Leuven.

Andrea Illiberi

Program Chair of the 4th ASD workshop 


ALD Academy on Nucleation and Area-Selective Deposition

There will be an ALD Academy on Nucleation and Area-Selective Deposition at Eindhoven University of Technology on April 3, 2019, the day before the 4th Area Selective Deposition workshop (ASD2019) in Leuven, Belgium (https://asd2019-workshop.org/). For those interested in both events, there will be transportation from Eindhoven to Leuven.

Area-selective deposition (ASD) has recently developed into an active field of research in both academia and industry, triggered by the fact that alignment is becoming a bottleneck in semiconductor fabrication. Especially area-selective atomic layer deposition (ALD) is acquiring attention for implementation in self-aligned fabrication schemes. This development builds on earlier successes in the fields of selective epitaxy and area-selective chemical vapor deposition (CVD). Besides nanoelectronics, ASD is expected to enable bottom-up fabrication in catalysis, energy generation and storage.

This ALD Academy is an introduction to ASD, and addresses fundamental aspects related to initial growth, nucleation mechanisms and...