Guanidinate based precursors for group 13 nitride ALD

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In this collaboration we aim to explore guanidinate precursors [(Me2N)C(NiPr)2]xM(NMe2)3-x, where M = Al, Ga or In for low temperature CVD and ALD of group 13 nitrides (AlN, GaN, InN and their alloys). Precursors will be synthesized by the Barrylab at Carleton University, Ottawa, Canada and tested in thermal CVD at Linköping University in Sweden, thermal and plasma ALD at both Carleton University and Linköping University.

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