Atomic layer deposition for BeoL Applications: NEXT GEN

Conference and dedicated workshop


18 Mar 2018 to 21 Mar 2018


Milano MI

MAM with the COST action Hooking together European Research in Atomic Layer Deposition (HERALD) will host a dedicated workshop on ALD for BEOL Applications in an extended metallization session during the 2018 conference. This special MAM-HERALD session aims to integrate European research activity in atomic layer deposition, bringing together existing groups, promoting young scientists and reaching out to industry and the public. Specially invited international guest speakers will contribute to the panel discussion and review how ALD will help the industry meet scaling demands and enable new device integration. This year event will be especially dedicated to NEXT GEN, both from the scientific point of view and to the participant point of view, with special support for young scientists.

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