MAM 2016 Materials for Advanced Metallization; Workshop on ALD for BEoL applications

Conference and special dedicated session


20 Mar 2016 to 23 Mar 2016


Radisson Blu Royal Hotel
Rue du Fossé aux Loups 47, 1000 Bruxelles


Radisson Blu Royal Hotel


Bruxelles, BE

It's about Atomic Layer Deposition for Back End of the Line, gathering together experienced researchers, young scientists and industry. Face to face interaction, round table discussions and more....


MAM with the COST action Hooking together European Research in Atomic Layer Deposition (HERALD) will host a dedicated workshop on ALD for BEOL Applications in an extended metallization session during the 2016 conference. This special MAM-HERALD session aims to integrate European research activity in atomic layer deposition, bringing together existing groups, promoting young scientists and reaching out to industry and the public. Specially invited international guest speakers will review how ALD will help the industry meet scaling demands and enable new device integration. Furthermore, an expert panel will debate critical issues from both industry and academia.

Organising Members: