Training school on ion beam techniques to study ALD films

Training school (deadline for registration 28 Sep 2017)


6 Nov 2017 to 8 Nov 2017


Department of Physics, University of Jyväskylä
Survontie 9 C, Jyväskylä
  • Purpose/aim of event: To first give the participants an introduction to different ion beam analysis techniques, especially in the analysis of thin films followed by a hands-on experience in the art of time-of-flight elastic recoil detection analysis (TOF-ERDA), Rutherford backscattering spectrometry (RBS) and helium ion microscopy (HIM)
  • Invited speakers:
  • Scientific program: The training program will consist of lectures on Monday (whole day) and Tuesday morning and then hands-on training using the instruments on Tuesday afternoon. The event will be over by 13.30 on Wednesday and transportation will be arranged to the JYV-HEL plane departing at 15.00
  • Social program: There will be a small get-together on Sunday evening starting at 18.00 with a possibility to go to sauna and, if weather permits, a short visit to see the auroras in the countryside. On Monday evening there will be a dinner, Tuesday evening is free.   
  • Venue: University of Jyväskylä, Finland (a nice Hotel Alba is located just 200 m away from the institute)
  • Local organiser: professor Timo Sajavaara and his group
  • Organising institution: Department of Physics, University of Jyväskylä, Finland
  • Short description of event: The event will consist of lectures in one day to explain the fundamentals of ion beam analysis followed by lectures explaining the state-of-the art of IBA today. A new tool, helium ion microscope, will also be covered. Most of the second and third day will focus in the hand-on training involving both measurements and analysis using TOF-ERDA, RBS and HIM. There is a possibility to bring own samples to measure as well.
  • Travel info: Jyväskylä can be easily reached by plane (45 min), train (3.5 h) or by bus (4 h) from Helsinki.
  • Cost, number of participants and travel support: The lectures, training and social events are free for the participants (max 15). There is travel support available for HERALD members and to max 4 non-members.
  • Diploma: The training is estimated to equal 1 ECTS. A diploma will be given to the participants.
  • Registration deadline 28 Sep 2017

For more info and registration, please contact

Organising Members: