Workshop on ALD FUNdamentals and reaction mechanisms

WG1 workshop


8 Jun 2015 to 9 Jun 2015


Eindhoven University of Technology
5612 AZ Eindhoven


Grand Café "Zwarte Doos" on the campus of Eindhoven University of Technology


Eindhoven (NL)

The aim of the workshop is to spark a discussion about current topics in the field of atomic layer deposition (ALD) by addressing fundamental aspects of the method. It is expected that this discussion will lead to new and refined insights beneficial to further advance the field of ALD. The aim is to serve both scientists who work at the forefront of ALD research as well as newcomers and technologists who want to get a better understanding of ALD.