Hardness, elastic modulus, and wear resistance of hafnium oxide-based films grown by atomic layer deposition Maria Berdova, Xuwen Liu, Claudia Wiemer, Alessio Lamperti, Grazia Tallarida, Elena Cianci, Marco Fanciulli, Sami FranssilaJournal of Vacuum Science & Technology A20163455151010.1116/1.4961113