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COST Action MP1402 - HERALD
Hooking together European research in Atomic Layer Deposition
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What is ALD?
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Working Group 1
Working Group 2
Working Group 3
Working Group 4
Working Group 5
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Keywords
13-N
2-D materials
2016
2D materials
2D materials; Optical properties
3D coating
AAO-templated patterning
abatement
absorption spectroscopy
activities
actuators
adhesion
adsorption
adsorption desorption noise fluctuations
advanced dental implants
Advanced Materials
AFM
Ag particles
Al2O3
ald
ALD EQUIPMENT SUPPLIER
ALD for MEMS
ALD for metallization
ALD fundamentals
ALD history
ALD history blog
ALD in mesoporous materials
ALD metal oxide
ALD metal oxide nanolaminates
ALD of 2D materials
ALD of 3D nanostructures
ALD of Metal Sulfides
ALD of metals
ALD of metals. Density functional theory (DFT). computational material science
ALD of metals. Density functional theory (DFT). computational material science.
ALD of metals. Density functional theory. simulation. copper interconnect.
ALD of Si-based materials
ALD on powders
ALD precursors
ALD process and precursors for metals and oxides
ALD reactor engineering
ALD symposium
ALD tool design
ALD Training School
ALE
ALEt
AlGaN
AlN
ALP
Alucone
alumina
anatase
antibacterial materials
antimicrobial properties
antireflection coatings
area selective deposition
Area Selective Deposition (ASD)
area selective epitaxy
Area-selective ALD
atmospheric pressure spatial ALD
atmospheric pressure spatial ALD of a range of oxides
Atomic Force Microscopy
Atomic Layer Deposition
Atomic Layer Deposition (ALD)
Atomic Layer Deposition (ALD); Polymers; Encapsulation; barrier layers
Atomic Layer Epitaxy
Atomic Layer Etching
Atomic Layer Processing
Awesomeness
AZO
BalticALD
barriers
BaTiO3
batteries
BCP
bioactive materials
biomaterials
Bionanocomposites
BIOSENSORS
BN thin film growth and nanostructures fabrication
boehmite
bonding analysis
brain inspired computing
Captain Corrosion
carbides
carbon dioxide utilisation
carbon nanomaterials
Carbon nanostructures
carbon nanotubes
Catalysis
catalysts
Catalytic combustion
catalytic films
CH3NH3PbI3
chalcogenides
characterization
chemical films
Chemical sensors
chemical synhtesis
chemical synthesis
Chemical vapor deposition
Chemical vapour deposition
china-ald
CMP
coatings
cobalt
collaboration
collaboration conference
colloidal photonic crystals
Combustion kinetics
complex oxides
computational chemistry
computational material science.
Conducting Polymers
conference
Conference final programme
conferences
conformality
coordination
copper
Copper halides
Correlated systems
corrosion
corrosion prevention
COST
COST news
Creativity
crystallisation
CVD
CVD; PE-CVD
deliverables; website; analytics
Density functional theory
Density functional theory (DFT)
deposition
desorption
Detectors
devices
DFT
diffuse reflectance spectroscopy (DRS)
distribution equipment
doped diamond
doping
E-MRS
Early Career Investigators (ECI)
ECD
EELS
Efficiency
elecronic devices
electrical properties
Electrochemical Impedance Spectroscopic analysis
Electrochemistry
electrode
Electrodeposition
electrolyzer
Electron Microscopy
electron spectroscopy
ellipsometric porosimetry (EP)
emerald module
emerging memory devices
Encapsulation; barrier layers; Plasma Enhanced (PE-) ALD; calcium test
energetics
Energy
energy efficient information technology
energy harvesting
Energy Materials
energy storage
enhanced reflectivity
environmental
environmental remediation
epitaxy
epitaxy ; atomic layer deposition
epsilon module
Erbium
etch process
etching
EU-Japan International Conference
EuroCVD
events
EXAFS
ferroelectricity
ferroelectricity in hafnium oxide
Ferromagnetic Resonance
few-layer deposition
FIB
FIB patterning
Flexible (Opto)electronic Device Applications (FLEXGaN)
flexible (opto)electronics
fluctuations
fluidized bed reactors
FLuorides Polymers
Focused Ion Beam
Fourier transform infrared spectroscopy (FTIR)
fracture strength
framework hypothesis
Fresnel Zone Plates
fuel cells
Functional Materials
functional oxides
functionalities
functionality
funding
gallium
GaN
GaN-on-Si
gas barrier
Gas sensing
Ge-Si-Sn nanostructures
general and inorganic chemistry
GIXRF
gold
graphene
great fun
group 13 nitrides
growth
growth deposits
growth mechanisms
gunidinates
halides
HAR
helium ion microscopy
heterostructures
HfO2
high aspect ratio
high k
high-k dielectric
high-k oxides
high-k perovskites
high-temperature
high-temperature photonics
history of ALD
HV-CVD
hybrid
hybrid materials
hybrid nanomaterials
hybrid process
Hybrids
hydrogen content
hydrogen permeable membranes
hydrogen storage
IBAD
III-nitride nanostructures by ALD
III-Nitride semiconductor materials
III-Nitride semiconductor materials (AlN
III-Nitride thin-film growth (plasma-enhanced atomic layer deposition)
III-Nitrides
in Situ
in situ characterization
in vacuo
in-situ
in-situ ALD
in-situ characterization
In-situ diagnostics
in-situ monitoring
in-vacuo
indium
InN
InN)
inorganic nanomaterials
inorganic thin films
integration on silicon
interaction
intercalation
interface
interfaces
iodides
Ion beam analysis
ion energy control
iron
ISSON16
Kevlar
Kinetic modeling
Kinetic Monte-Carlo
Kinetics of MLD
kMC
lab visit
laboratory
Lanthanides
LHAR
Li-ion batteries
light emitting diodes
LiNbO3
lithography
low temperature
low temperature ALD
Luminescence
Magnetism
Maido Merisalu
MAPbI3
MAPI
mass spectrometry
Material Characterization
Material Science
Materials
materials characterization
materials chemistry
Materials Engineering
materials for energy
materials growth
materials physics
Materials Science
MCPs
mechanical properties
mechanisms
Meeting
membrane
membrane technology
membranes
memory devices
memristive devices
memristor
MEMS
MEMS/NEMS
metal
metal nanostructures
metal oxide
metal oxides
metal-organic frameworks
metals
Metamaterials
metastable
micro-battery
Micro-Nano Optics
micro-supercapacitor
Microfabrication
micromechanics
micromirror
microprojectors
Mixed Metal Oxides
MLD
MLD modelling
MLD modelling organic/inorganic density functional theory
MOCVD
modeling of the size distribution
modelling
modelling microstructural development
molecular dynamics
Molecular Layering
MoO3
Mossbauer Spectroscopy
multiferroics
Multilayers
Nano-Optics
nanocatalysis
Nanocatalysts
Nanocomposites
nanofabrication
Nanofibers
nanofluidics
nanolaminates
nanomaterials
nanonetworks
nanoparticle growth
Nanoparticles
nanopore
Nanoscience
nanostructured semiconductors
nanostructures
nanosystems
nanotechnology
nanotechnology; nanowires; semiconductor devices; ZnO; nanostructures
nanotube
nanowire
nanowires
networking
neural network
neuromorphic
neuromorphic systems
new processes
NEXAFS
NiO
nitrides
nitrogen adsorption
noise
non-volatile memories
non-volatile memories based on nanocrystals and traps
Nonlinear optics
novel applications
NOVEL SENSORS
nucleation
nucleation and growth
nucleation inhibition
nucleation promotion
operando materials analysis
optical biosensors
optical characterization
optical materials
Optical properties
optical sensors and biosensors
Optics
optoelectronics
Organic Solar Cells
Organic/inorganic thin film deposition
Organic/inorganic thin film deposition and structures
Organometallics
oxide
oxide based materials
oxides
oxides; 2D nanosheets; nanofibers; nanopattering; sensors; energy devices
particles
passivating contacts
passivation
patterning
PE-ALD
PE-CVD
PEALD
PECVD
PEEM
PEM
perovskite
perovskites
pharmaceuticals
PhD
PhD thesis list
photo-assisted ALD
Photo-Electron Spectroscopy (PES)
photocatalysis
photocatalysis;
Photoelectrochemistry
photoelectrochemistry; photocatalysis; metal oxides
Photoelectron Spectroscopy
photoemission
photonic devices
photonic devices.
phototransport tuned by traps and nanocrystals
photovoltaics
piezoelectricity
plasma
plasma activation
Plasma ALD
plasma ALD of oxides and nitrides
plasma catalysis
Plasma Enhanced (PE-) ALD
Plasma Processes
plasma processing
Plasma-assisted ALD
plasma-enhanced ALD
Plasmonics
Plasmons
PLD
Polymer nanostructures
Polymeric Thin Films
Polymers
Porous alumina
porous and crystalline materials
porous materials
post-CMP clean
Powders
precursor chemistry
precursor testing
Precursors
process development
process modeling
process monitoring
process testing
processes
programme
project management
protective coatings
publication
pulsar module
pulsed-pressure MOCVD
PV
PVD
pyroelectricity
QCM
QMS
quantum chemistry
quantum confinement in nanostructures
questionnaire
Raman
rare earth perovskite
RBS
reaction mechanisms
Reactive Ion Etching
real-time
real-time studies
REALD
reference-free X-ray fluorescence anaylsis
residual stress
resistive switching
roadmapping
RRAM
Russia
Ruthenium
Scanning Probe Microscopy
Scanning Probe Microscopy (SPM)
scientific reviews
SE
SEE materials
selective area
selective HV-CVD
semiconductor
semiconductor devices
Semiconductor oxides
semiconductors
Sensor Development
sensors
SiC
SiGe
Silica surface
silicon
silicon solar cell
silicon solar cells
silver nanoparticles
Sinterstable catalysts
SIS
social media
SOFC
soft chemistry
solar cells
Solid state chemistry
spacers
Spatial ALD
spectroscopic ellipsometry
Spectroscopic Ellipsometry (SE)
Spintronics
SrTiO3
stability
stimuli responsive polymers
STM
storage
structural analysis
STS
STSM
students
STXM
sulfides
supconducting ALD thin films
superconductivity
surface
Surface Analysis
surface and interface engineering
surface chemistry
surface engineering
surface functionalisation
Surface Modification
surface passivation
surface plasmon resonance
surfaces
synchrotron radiation
synchrotron spectroscopy
Synthesis
Ta2O5
TaN
TCO
TCOs
Team Work
Ternary materials
ternary oxides
thermal ALD
thermodynamics
thickness
thin film
thin film stress
Thin film transistors
thin films
Thin-films
Time-of-Flight Secondary Ions Mass Spectrometry
TiN
TiO2
TiO2 based materials
TiO2 nanotubes
titania
titania 1-D substrates
titania nanotubes
TMDC
tool development
topological insulators
Total Reflection X-ray Fluorescence
TPD
Training School
transistors
transition metals
transparent coating
transparent conductive materials
transparent conductive materials
transport
travel grant
tunnel junctions
TXRF
undefined
UPS
Vacuum Technology
Vanadium oxide structures
vapor phase infiltration
Vapour Delivery
Virtual Project on the History of ALD
visit
VPHA
water splitting
Workshop
workshops
x-ray absorption
X-ray diffraction
X-Ray Diffractometry (XRD)
X-Ray Fluorescence (XRF)
X-ray Microscopy
X-ray photoemission spectroscopy
X-ray reflectivity
X-ray Reflectometry
X-Ray Reflectometry (XRR)
X-rays
XAS
XPS
XRF
XRR
Young´s modulus
zinc oxide
ZnO
ZnO; ZrO2; DSC
ZrO2
COST is supported by the EU Framework Programme Horizon 2020
