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COST Action MP1402 - HERALD

Hooking together European research in Atomic Layer Deposition

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Prof. Jordi Arbiol

Steffen Strehle

Imre Miklós Szilágyi

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COST is supported by the EU Framework Programme Horizon 2020

Keywords

ald
Atomic Layer Deposition (ALD)
MLD
hybrid materials
PEALD
2D materials
CVD
Al2O3
high-k dielectric
thin films
semiconductor devices
solar cells
Precursors
TiO2
nucleation and growth
XPS
ALD precursors
nanostructures
graphene
VPHA
nanotechnology
ALD for MEMS
nanomaterials
process development
low temperature ALD
Functional Materials
ZnO
Virtual Project on the History of ALD
synchrotron radiation
photocatalysis

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