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COST Action MP1402 - HERALD

Hooking together European research in Atomic Layer Deposition

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Prof. Jordi Arbiol

Steffen Strehle

Imre Miklós Szilágyi

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COST is supported by the EU Framework Programme Horizon 2020

Keywords

ald
Atomic Layer Deposition (ALD)
hybrid materials
MLD
high-k dielectric
PEALD
CVD
2D materials
solar cells
thin films
Al2O3
semiconductor devices
TiO2
XPS
Precursors
nucleation and growth
nanotechnology
nanomaterials
photocatalysis
ALD precursors
ZnO
VPHA
nanostructures
ALD for MEMS
graphene
HfO2
synchrotron radiation
Virtual Project on the History of ALD
process development
Functional Materials

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