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COST Action MP1402 - HERALD

Hooking together European research in Atomic Layer Deposition

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Prof. Jordi Arbiol

Steffen Strehle

Imre Miklós Szilágyi

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COST is supported by the EU Framework Programme Horizon 2020

Keywords

ald
Atomic Layer Deposition (ALD)
hybrid materials
2D materials
PEALD
MLD
Al2O3
high-k dielectric
thin films
nucleation and growth
semiconductor devices
Precursors
solar cells
CVD
XPS
TiO2
nanostructures
VPHA
ALD for MEMS
nanomaterials
Functional Materials
ZnO
graphene
Virtual Project on the History of ALD
nanotechnology
low temperature ALD
ALD precursors
Catalysis
process development
photocatalysis

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