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COST Action MP1402 - HERALD

Hooking together European research in Atomic Layer Deposition

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Prof. Jordi Arbiol

Steffen Strehle

Imre Miklós Szilágyi

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COST is supported by the EU Framework Programme Horizon 2020

Keywords

ald
Atomic Layer Deposition (ALD)
MLD
PEALD
hybrid materials
high-k dielectric
2D materials
CVD
Al2O3
solar cells
thin films
semiconductor devices
TiO2
Precursors
nucleation and growth
XPS
nanomaterials
ZnO
ALD precursors
VPHA
nanostructures
graphene
ALD for MEMS
nanotechnology
photocatalysis
synchrotron radiation
low temperature ALD
Virtual Project on the History of ALD
Functional Materials
process development

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