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COST Action MP1402 - HERALD
Hooking together European research in Atomic Layer Deposition
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What is ALD?
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Working Group 1
Working Group 2
Working Group 3
Working Group 4
Working Group 5
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nanotechnology
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Mario Ziegler
Prof. Jordi Arbiol
Colm O'Dwyer
Steffen Strehle
Maido Merisalu
Imre Miklós Szilágyi
Marcel Junige
Ivana Capan
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COST is supported by the EU Framework Programme Horizon 2020
Keywords
ald
Atomic Layer Deposition (ALD)
hybrid materials
MLD
thin films
2D materials
PEALD
CVD
Al2O3
Precursors
TiO2
high-k dielectric
semiconductor devices
solar cells
nucleation and growth
graphene
nanostructures
nanomaterials
nanotechnology
VPHA
XPS
ALD for MEMS
ZnO
photocatalysis
Virtual Project on the History of ALD
ALD precursors
low temperature ALD
Functional Materials
conformality
HfO2