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COST Action MP1402 - HERALD

Hooking together European research in Atomic Layer Deposition

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nanotechnology

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Prof. Jordi Arbiol

Steffen Strehle

Imre Miklós Szilágyi

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COST is supported by the EU Framework Programme Horizon 2020

Keywords

ald
Atomic Layer Deposition (ALD)
MLD
hybrid materials
PEALD
solar cells
2D materials
thin films
high-k dielectric
Al2O3
CVD
semiconductor devices
Precursors
nucleation and growth
TiO2
XPS
ALD for MEMS
graphene
nanostructures
ZnO
VPHA
nanotechnology
ALD precursors
nanomaterials
photocatalysis
Functional Materials
synchrotron radiation
low temperature ALD
process development
HfO2

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