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COST Action MP1402 - HERALD

Hooking together European research in Atomic Layer Deposition

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Prof. Jordi Arbiol

Steffen Strehle

Imre Miklós Szilágyi

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COST is supported by the EU Framework Programme Horizon 2020

Keywords

ald
Atomic Layer Deposition (ALD)
hybrid materials
MLD
high-k dielectric
PEALD
CVD
solar cells
2D materials
thin films
Al2O3
semiconductor devices
TiO2
XPS
nucleation and growth
ALD precursors
Precursors
ALD for MEMS
nanostructures
graphene
nanotechnology
nanomaterials
ZnO
photocatalysis
VPHA
synchrotron radiation
HfO2
Virtual Project on the History of ALD
Functional Materials
process development

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