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COST Action MP1402 - HERALD

Hooking together European research in Atomic Layer Deposition

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nanotechnology

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Prof. Jordi Arbiol

Steffen Strehle

Imre Miklós Szilágyi

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COST is supported by the EU Framework Programme Horizon 2020

Keywords

ald
Atomic Layer Deposition (ALD)
hybrid materials
PEALD
2D materials
MLD
Al2O3
thin films
nucleation and growth
semiconductor devices
Precursors
solar cells
high-k dielectric
CVD
TiO2
nanostructures
VPHA
XPS
ZnO
Functional Materials
ALD for MEMS
Virtual Project on the History of ALD
graphene
nanotechnology
low temperature ALD
nanomaterials
conformality
photocatalysis
process development
HfO2

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