Marcel Junige

Action Member

COST Country: 

  • Germany

Primary Working Group: 



Personal or laboratory research profile: 

M. Sc. Marcel Junige is a staff Scientist and currently within one year of submitting his PhD dissertation on “In-situ real-time Spectroscopic Ellipsometry as a method for the investigation of [oxide, nitride, and metal] Atomic Layer Depositions” at the Technische Universität Dresden (TUD), Institute of Semiconductors & Microsystems (IHM), in the ALD group of Prof. Dr. rer. nat. J. W. Bartha. Already in 2008, a student research project at the IHM on the “Investigation and Optimization of a plasma-enhanced Ruthenium ALD process” sparked his interest for the combination of ALD and ellipsometry. Ibidem, he received his Master of Science in 2011 with the “Development and characterization for a thermal-activated Atomic Layer Deposition process of Ruthenium via in-situ measurement techniques”, which was assigned the GLOBALFOUNDRIES award for the year's best diploma thesis in the microelectronics degree program. After his master’s, he got a six-months contract as a Scientist at the Nano-electronic Materials Laboratory gGmbH (NaMLab) Dresden, before receiving a three-years PhD fellowship from the European Social Fund (ESF) and the Free State of Saxony of the Federal Republic of Germany. At the turn of 2012/13, Marcel stayed for a quarter of a year as a visiting researcher for the “Atomic Layer Deposition of metals monitored by in-situ Ellipsometry” at the University of Nebraska at Lincoln, USA, in the ellipsometry group of Prof. Dr. habil. M. Schubert. Since end 2014, he has been researching on the project “Quantum-mechanical device concepts including ultra-thin functional ALD-films for employment in TeraHertz applications” (Qualify THz), funded by the German Research Foundation (DFG). In total until now, Marcel’s expertise in ALD and in-situ as well as in-vacuo metrology bases on 9 years of practical experience and circa 40 publications in peer-reviewed journals as well as international conferences. He has been a student member of SPIE (in 2015), the Deutsche Physikalische Gesellschaft e. V. (since 2014), American Vacuum Society (in 2013 and 2015), Arbeitskreis Ellipsometrie (AKE) – Paul Drude e. V. (since 2012), VDE – Verband der Elektrotechnik Elektronik Informationstechnik e. V. (since 2011). Furthermore, Marcel received a Saxonian Certificate of University Didactics from the Hochschuldidaktisches Zentrum Sachsen (HDS) in 2013. He mentored for two semesters the seminars to the lectures “Basics of Electrical Engineering” as well as “Electric and Magnetic Fields” at the TUD, supervised several master’s theses (T. F. Walther, S. Balasubramanyam, J. Reif) as well as student research projects (V. Sharma, T. Oddoy, R. Tanner) at the IHM, and gave a 90-min lecture on “In-situ characterization for ALD/ MLD” at the HERALD summer school “Atomic Layer Deposition: Method and Applications” 2015 in Brescia, Italy, as well as a 30-min tutorial on “In-situ metrology techniques in ALD” at the EFDS workshop “ALD for Industry” 2017 in Dresden. In order to further build his academic track from 2018 onwards, this Early Career Investigator (ECI) currently strives for a Marie Skłodowska-Curie Individual Global Fellowship of the European Commission.