Primary Working Group:
Personal or laboratory research profile:
Our research focus extends from the growth and characterization of functional semiconductor materials to the design, fabrication, and characterization of enabling devices for a variety of applications. In our group, we start with the growth/synthesis of functional semiconductor materials in either thin film or nanostructured forms using mainly two materials growth techniques including chemical vapor deposition (thermal atomic layer deposition & plasma-enhanced atomic layer deposition) and physical vapor deposition (DC/RF-Sputtering). Growth recipes for a variety of functional semiconductor materials are being optimized through a detailed materials characterization process including structural, optical, electrical, and surface/morphological characterization tools. With the optimized recipe parameters in our hand we target to produce a variety of devices including chemical and biological sensors, micro/nano-electromechanical actuators, electronic and opto-electronic passive and active components, photo-catalysis coatings, organic/inorganic solar-cells, reconfigurable RF components, etc. Our main target is to contribute both to the materials and device aspect of semiconductor research:
- Semiconductor materials research by investigating alternative growth techniques and combining our techniques/materials with inter-disciplinary methods/materials to produce novel micro/nano-scale functional semiconductor materials.
- Semiconductor device research by using the developed materials and standard micro and nano-fabrication tools and processes, developing alternative micro/nano-scale devices for a variety of applications including but not limited to sensing, flexible and transparent electronics, renewable energy, wireless communication, national security, health monitoring and medical diagnosis.