Oili Ylivaara

Action Member

COST Country: 

  • Finland

Primary Working Group: 

Personal or laboratory research profile: 

I work as a researcher and project manager at VTT Finland. Our ALD research is generally related to MEMS applications. We also have ability to characterize mechanical properties of thin ALD films (residual stress, hardness, elastic modulus, adhesion, and friction and wear). My interests are in mechanical characterization of the ALD films, conformality analysis, and in new ALD application areas.