Umut Tunca Sanli

Action Member

COST Country: 

  • Germany

Primary Working Group: 



Personal or laboratory research profile: 

I operate an ALD instrument from SENTECH Instruments since 2013. We have got the following options: Thermal ALD, Plasma Enhanced Deposition (remote), In-Situ Ellipsometry (SE), Ellipsometry Mapping, Process Gases "O3, O2, NH3, H2, N2 and Ar".

I am also a user of a Dual Beam System from FEI.