Co-organized WG2 Workshop May 23-24 in Helsinki

Finnish Centre of Excellence in ALD (ALDCoE) welcomes you to a combined HERALD Working group 2 workshop and 4th annual seminar of ALDCoE to be held May 23-24, 2016 in Helsinki, Finland. The topics of the two-day event will include precursor and process development, including in situ studies, for ALD. Invited talks and poster contributions from both industry and academia will give a broad overview on the latest advancements on the topic. For more details and registration, go to: Registration is free of charge (number of attendees is limited) and now open at the event website. Check out also the available sponsorship opportunities. Workshop chair: Markku Leskelä.