Training school on ion beam techniques to study ALD films in Jyväskylä, Finland, 6-8 Nov 2017

  • Purpose/aim of event: To first give the participants an introduction to different ion beam analysis techniques, especially in the analysis of thin films, followed by a hands-on experience in the art of time-of-flight elastic recoil detection analysis (TOF-ERDA), Rutherford backscattering spectrometry (RBS) and helium ion microscopy (HIM)
  • Invited speakers and tentative titles:
    • Prof. Mikko Ritala, University of Helsinki, Finland: Importance of ion beam analysis in ALD research
    • Prof. Chris Jeynes, University of Surrey, UK: IBA (RBS) basics and application for thin film studies
    • Dr. Daniel Primetzhofer, University of Uppsala, Sweden: Medium energy ion scattering
    • Dr. Johan Meerschaut, Imec, Belgium: Ion beam analysis in industrial environment at Imec
    • Dr. Kai Arstila, University of Jyväskylä, Finland: Helium ion microscopy and spectroscopy
    • Prof. Timo Sajavaara, University of Jyväskylä, Finland: Analysis of light and heavy elements using heavy-ion ERDA
  • Cost, number of participants and travel support: The lectures, training and social events are free for the participants (max 15). There is travel support available for HERALD member institutes and to max 4 non-members.
  • Registration deadline 28 Sep 2017
  • For more info and registration, please visit and contact