HERALD White Paper on the future of atomic level processing

Executive Summary
Atomic-level control of materials processing will be needed in the semiconductor industry within the next 5-10 years, and will be a powerful enabling technology for other high-tech manufacturing sectors. This will
be possible if atomic-level precision can be achieved with the traditional fabrication steps – deposition, patterning and etching. There is therefore a strong need for coordinated research now into how the current concept of atomic layer deposition may be developed into selective-area patterning and atomically controlled etching.