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COST Action MP1402 - HERALD
Hooking together European research in Atomic Layer Deposition
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What is ALD?
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COST is supported by the EU Framework Programme Horizon 2020
Keywords
ald
Atomic Layer Deposition (ALD)
hybrid materials
MLD
PEALD
high-k dielectric
CVD
2D materials
solar cells
Al2O3
thin films
semiconductor devices
TiO2
XPS
Precursors
nucleation and growth
graphene
VPHA
nanomaterials
ALD for MEMS
photocatalysis
ALD precursors
nanostructures
ZnO
nanotechnology
HfO2
synchrotron radiation
process development
Functional Materials
Virtual Project on the History of ALD
