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COST Action MP1402 - HERALD
Hooking together European research in Atomic Layer Deposition
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COST is supported by the EU Framework Programme Horizon 2020
Keywords
ald
Atomic Layer Deposition (ALD)
MLD
hybrid materials
high-k dielectric
PEALD
CVD
solar cells
thin films
2D materials
Al2O3
semiconductor devices
Precursors
TiO2
nucleation and growth
XPS
nanomaterials
photocatalysis
ALD for MEMS
ZnO
VPHA
nanostructures
ALD precursors
graphene
nanotechnology
Virtual Project on the History of ALD
process development
Functional Materials
low temperature ALD
HfO2
