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COST Action MP1402 - HERALD
Hooking together European research in Atomic Layer Deposition
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COST is supported by the EU Framework Programme Horizon 2020
Keywords
ald
Atomic Layer Deposition (ALD)
hybrid materials
MLD
high-k dielectric
PEALD
Al2O3
thin films
CVD
2D materials
solar cells
semiconductor devices
ALD precursors
Precursors
nucleation and growth
TiO2
XPS
ZnO
VPHA
nanostructures
ALD for MEMS
graphene
nanotechnology
nanomaterials
photocatalysis
Virtual Project on the History of ALD
process development
Functional Materials
low temperature ALD
HfO2
