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COST Action MP1402 - HERALD
Hooking together European research in Atomic Layer Deposition
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COST is supported by the EU Framework Programme Horizon 2020
Keywords
ald
Atomic Layer Deposition (ALD)
MLD
hybrid materials
PEALD
2D materials
high-k dielectric
solar cells
thin films
CVD
Al2O3
semiconductor devices
nucleation and growth
Precursors
XPS
TiO2
nanotechnology
ALD for MEMS
graphene
nanomaterials
ZnO
VPHA
ALD precursors
nanostructures
synchrotron radiation
Virtual Project on the History of ALD
photocatalysis
process development
low temperature ALD
Functional Materials
