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COST Action MP1402 - HERALD
Hooking together European research in Atomic Layer Deposition
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What is ALD?
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COST is supported by the EU Framework Programme Horizon 2020
Keywords
ald
Atomic Layer Deposition (ALD)
MLD
hybrid materials
PEALD
solar cells
thin films
Al2O3
CVD
high-k dielectric
2D materials
semiconductor devices
Precursors
TiO2
XPS
nucleation and growth
nanomaterials
ALD precursors
photocatalysis
ZnO
VPHA
graphene
ALD for MEMS
nanostructures
nanotechnology
Functional Materials
low temperature ALD
Virtual Project on the History of ALD
HfO2
process development
