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COST Action MP1402 - HERALD
Hooking together European research in Atomic Layer Deposition
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COST is supported by the EU Framework Programme Horizon 2020
Keywords
ald
Atomic Layer Deposition (ALD)
MLD
hybrid materials
2D materials
PEALD
thin films
CVD
Al2O3
high-k dielectric
nucleation and growth
TiO2
solar cells
Precursors
XPS
semiconductor devices
nanotechnology
ALD precursors
nanomaterials
VPHA
graphene
ALD for MEMS
nanostructures
low temperature ALD
Functional Materials
ZnO
Virtual Project on the History of ALD
photocatalysis
synchrotron radiation
conformality
