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COST Action MP1402 - HERALD
Hooking together European research in Atomic Layer Deposition
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COST is supported by the EU Framework Programme Horizon 2020
Keywords
ald
Atomic Layer Deposition (ALD)
hybrid materials
PEALD
2D materials
MLD
Al2O3
solar cells
high-k dielectric
CVD
thin films
nucleation and growth
semiconductor devices
Precursors
TiO2
nanostructures
VPHA
XPS
graphene
low temperature ALD
nanotechnology
nanomaterials
ZnO
Functional Materials
Virtual Project on the History of ALD
ALD for MEMS
HfO2
ALD precursors
Catalysis
conformality
