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COST Action MP1402 - HERALD
Hooking together European research in Atomic Layer Deposition
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COST is supported by the EU Framework Programme Horizon 2020
Keywords
ald
Atomic Layer Deposition (ALD)
MLD
hybrid materials
high-k dielectric
PEALD
CVD
solar cells
2D materials
thin films
Al2O3
semiconductor devices
TiO2
XPS
nucleation and growth
Precursors
nanostructures
ALD for MEMS
nanotechnology
nanomaterials
ZnO
photocatalysis
VPHA
graphene
ALD precursors
synchrotron radiation
Functional Materials
Virtual Project on the History of ALD
low temperature ALD
HfO2
