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COST Action MP1402 - HERALD
Hooking together European research in Atomic Layer Deposition
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COST is supported by the EU Framework Programme Horizon 2020
Keywords
ald
Atomic Layer Deposition (ALD)
hybrid materials
PEALD
2D materials
MLD
Precursors
thin films
CVD
nucleation and growth
high-k dielectric
Al2O3
semiconductor devices
solar cells
nanostructures
XPS
VPHA
Virtual Project on the History of ALD
ALD for MEMS
graphene
nanotechnology
low temperature ALD
Functional Materials
TiO2
nanomaterials
process development
HfO2
ALD precursors
photocatalysis
ZnO
