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COST Action MP1402 - HERALD
Hooking together European research in Atomic Layer Deposition
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COST is supported by the EU Framework Programme Horizon 2020
Keywords
ald
Atomic Layer Deposition (ALD)
hybrid materials
MLD
PEALD
2D materials
thin films
CVD
Al2O3
TiO2
Precursors
high-k dielectric
semiconductor devices
solar cells
nucleation and growth
nanostructures
graphene
ALD for MEMS
VPHA
nanomaterials
nanotechnology
XPS
Virtual Project on the History of ALD
photocatalysis
low temperature ALD
ALD precursors
Functional Materials
ZnO
Catalysis
HfO2
