WG4 - Devices

Description and purpose: 

To develop and integrate ALD processes for oxides, sulfides and nitrides for applications in transparent electronics, memristors, light emitting devices and nanosensors, in collaboration with industry.

Joint Publications:



Workshops for this WG:

ALD Symposium at SEMICON Europa

Novel High k Application Workshop 2015

Novel High k Application Workshop 2016

MAM 2016 Materials for Advanced Metallization; Workshop on ALD for BEoL applications

second Belux workshop